Cross Tables

• air-lubricated bearing
• multi-axis systems
• direct drive with linear motors
• can be protected from the penetration of dirt and dust
• suitable for high-speed applications
• adapted as integrated devices into your control system or fitted with an internal control system

Linear axis

• air-lubricated bearing
• friction-free and stick-slip-free movement
• high precision
• very high repeat accuracy and synchronism
• can be supplied with guide track coverings
• can also be operated as Z-axes

Air bearing round tables

• available as round tables without motors and measuring systems (passive round tables)
• available as direct drive round tables with integrated motor and measuring system (active round tables)
• Highly precise axes have concentricity errors up to 50 nm radial and up to 20 nm axial
• suitable for chip removal operations

basic air bearings, Pads

• Linear systems can be efficiently and economically assembled with basic air bearings (air bearing pads)
• standard air bearings with diameters of 20 mm to 500 mm
• load-bearing capacity of up to 100 kN
• air bearings with integrated suction for cleanroom or vacuum applications available
• rectangular air bearings, high-speed bearings and vacuum preloaded air bearings available

air bearing spindles

• High-precision and high-speed air bearing spindles
• for mechanical processing or scanning

coplanar passive systems and strocke cylinder

• permit movement with several degrees of freedom
• can be clamped by switching off the supply air
• serve to transport thin substrates such as wafers, glass sheets and metal sheet
• operate friction-free, without stick-slip
• ideal for weight compensation in Z-axes

Rotating unions

• designed for the transition of vaccum or air in rotating systems
• no friction because of air bearing technology
• no breakaway torque, no stick-slip effect
• maintenance-free
• high operational life time
• combination of media can be chosen freely
• even suitable for higher rpm

Translation stages

• Travel range up to 2800mm
• 2.5 μm resolution or higher
• X-Y-Z configurations available
• High guide ways accuracy
• Vacuum versions available

Direct-drive motor stages

• Travel range up to 300mm x 300mm
• Accuracy up to ±0.5μm
• High loads up to 150kg
• Bidirectional repeatability up to ±0.5μm

Vertical translation stages

• Loads up to 8kg
• Travel range up to 25mm
• Repeatability ≤ 3μm
• Vacuum versions available

Rotation stages

• With or without aperture
• High load up to 1000kg

Goniometers

•  Smooth operations
•  Travel range ±2.5°
•  Superb stability
•  Stackable (1 or 2 axes of rotation)

motorized iris diaphragms

• Various aperture range
• Smooth and fast operation
• Compact design

Screws and actuators

• Travel range up to 25mm
• High load up to 70N
• Vacuum versions available

custom systems

Motion controller

• One controller, one interface for any type of motor (Bipolar Stepper, DC, BLDC)
• Compatible with Windows XP/Vista/7/8/10, Linux, Mac OS
• Max. speed – 35000 steps/s (stepper); 800000 encoder counts per second (DC)
• Code Examples for Visual Basic, C, C#, C++, Matlab, Labview, Python

Vacuum

• Vacuum 10^-6 mbar, bake out at 80°C
• High Vacuum 10^-7 mbar, bake out at 100°C
• Ultra High Vacuum 10^-9 mbar, bake out at 110°C
• Ultra High Vacuum Special
  10^-10 mbar, bake out at 200°C

Cryogenic

• Standard 77°K
• Vacuum compatible
• R & D 4°K

Piezo Actuators and Stages

Positioning Tools

Fiber Switches

Special Solutions

Amplifier