Multilayer piezo actuator stacks with copper inner electrodes for higher performance, humidity resistant and longer lifetime.
Compact Power. Unmatched Durability. Discover CuX Piezo Stacks
The CuX series provides compact, high-efficiency multilayer piezo actuator stacks designed for demanding industrial and scientific applications. Engineered using advanced piezoceramic (PZT) materials, these stacks offer rapid response times, exceptional durability, and precise displacement across a wide range of voltages.
Key Features
Higher Performance
With more optimized active areas, CuX stacks can achieve 20% greater strokes.
Humidity Resistant and Cost-Effective
With copper-based design, CuX stacks are outstanding against humidity and better cost-effective solution.
Higher Temperature Operation
Thanks to lead-free metal bond, CuX stacks are extremely durable at temperature range of 200°C without embrittlement.
Longer Lifetime
CuX stacks have extended lifetime, tested up to 1 billion cycles with 83Hz and 170°C. Proven durability up to 95% humidity.
Available in High Volume
CuX stacks are available in high-volume with short delivery times.
Choosing CuX means more than just advanced piezo performance—it’s a smart business decision. With extended lifetime and outstanding durability, CuX stacks reduce replacement intervals and maintenance costs, resulting in a significantly lower total cost of ownership. Their copper-based design shields you from raw material price swings, ensuring consistent, reliable budgeting.
Need parts fast? CuX stacks are volume-ready with short delivery times for standard configurations, supporting accelerated development and reduced time-to-market. Their scalable production capability makes them ideal for OEMs and high-volume applications.
Typical Applications
Precision mechanics and automation for semiconductor manufacturing
CuX stacks deliver up to 20% greater stroke and longer lifetime compared to conventional piezo stacks. Moreover, these stacks enable smaller assemblies for higher extension factor, which make them ideal for demanding semiconductor environments, such as wafer alignment, lithography and mask inspection processes.
High-end solutions for micro-dispensing valves
CuX stacks incorporate high-temperature stable bonding validated up to 200 °C and offer excellent resistance to humidity and aggressive media. CuX stacks ensure high repeatability and long-term reliability in micro-dosing and jetting applications, even under harsh process conditions.
Aerospace and optical systems
CuX stacks provide fast sub-millisecond response with higher stiffness, which is ideal for fine optical adjustments, active stabilization, and lightweight aerospace systems where reliability, compactness, and performance are highly critical.
Microfluidics and dosing control
High dynamic range, precise displacement control and low hysteresis enable accurate dosing of small volumes in analytical instruments and lab-on-chip platforms. CuX actuators can perform repeatable microfluidic control under fluctuating temperature and loads.
Active vibration and noise control
With their high force density and long cycle life, CuX actuators are well-suited for real-time vibration damping in precision equipment and vehicles. Their rapid actuation and robust construction support consistent performance in dynamic and high-frequency environments.