Air bearings

- air-lubricated bearing
- multi-axis systems
- direct drive with linear motors
- can be protected from the penetration of dirt and dust
- suitable for high-speed applications
- adapted as integrated devices into your control system or fitted with an internal control system

- available as round tables without motors and measuring systems (passive round tables)
- available as direct drive round tables with integrated motor and measuring system (active round tables)
- Highly precise axes have concentricity errors up to 50 nm radial and up to 20 nm axial
- suitable for chip removal operations

- Linear systems can be efficiently and economically assembled with basic air bearings (air bearing pads)
- standard air bearings with diameters of 20 mm to 500 mm
- load-bearing capacity of up to 100 kN
- air bearings with integrated suction for cleanroom or vacuum applications available
- rectangular air bearings, high-speed bearings and vacuum preloaded air bearings available

- High-precision and high-speed air bearing spindles
- for mechanical processing or scanning

- permit movement with several degrees of freedom
- can be clamped by switching off the supply air
- serve to transport thin substrates such as wafers, glass sheets and metal sheet
- operate friction-free, without stick-slip
- ideal for weight compensation in Z-axes
Mechanical bearings

- Travel range up to 2800mm
- 2.5 μm resolution or higher
- X-Y-Z configurations available
- High guide ways accuracy
- Vacuum versions available

- Loads up to 8kg
- Travel range up to 25mm
- Repeatability ≤ 3μm
- Vacuum versions available

- Travel range up to 200 μm
- High resolution up to 0.1nm
- Vacuum versions available

- Smooth operations
- Travel range ±2.5°
- Superb stability
- Stackable (1 or 2 axes of rotation)