Air bearings
- air-lubricated bearing
- multi-axis systems
- direct drive with linear motors
- can be protected from the penetration of dirt and dust
- suitable for high-speed applications
- adapted as integrated devices into your control system or fitted with an internal control system
- air-lubricated bearing
- friction-free and stick-slip-free movement
- high precision
- very high repeat accuracy and synchronism
- can be supplied with guide track coverings
- can also be operated as Z-axes
- available as round tables without motors and measuring systems (passive round tables)
- available as direct drive round tables with integrated motor and measuring system (active round tables)
- Highly precise axes have concentricity errors up to 50 nm radial and up to 20 nm axial
- suitable for chip removal operations
- Linear systems can be efficiently and economically assembled with basic air bearings (air bearing pads)
- standard air bearings with diameters of 20 mm to 500 mm
- load-bearing capacity of up to 100 kN
- air bearings with integrated suction for cleanroom or vacuum applications available
- rectangular air bearings, high-speed bearings and vacuum preloaded air bearings available
- High-precision and high-speed air bearing spindles
- for mechanical processing or scanning
Coplanar passive systems and stroke cylinder
- permit movement with several degrees of freedom
- can be clamped by switching off the supply air
- serve to transport thin substrates such as wafers, glass sheets and metal sheet
- operate friction-free, without stick-slip
- ideal for weight compensation in Z-axes
- designed for the transition of vaccum or air in rotating systems
- no friction because of air bearing technology
- no breakaway torque, no stick-slip effect
- maintenance-free
- high operational life time
- combination of media can be chosen freely
- even suitable for higher rpm
Mechanical bearings
- Travel range up to 2800mm
- 2.5 μm resolution or higher
- X-Y-Z configurations available
- High guide ways accuracy
- Vacuum versions available
Direct-Drive Motor Stages
- Travel range up to 300mm x 300mm
- Accuracy up to ±0.5μm
- High loads up to 150kg
- Bidirectional repeatability up to ±0.5μm
Vertical Translation Stages
- Loads up to 8kg
- Travel range up to 25mm
- Repeatability ≤ 3μm
- Vacuum versions available
- With or without aperture
- High load up to 1000kg
- Travel range up to 200 μm
- High resolution up to 0.1nm
- Vacuum versions available
Motorized Iris Diaphragms
- Various aperture range
- Smooth and fast operation
- Compact design
- Travel range up to 25mm
- High load up to 70N
- Vacuum versions available
- Smooth operations
- Travel range ±2.5°
- Superb stability
- Stackable (1 or 2 axes of rotation)
- One controller, one interface for any type of motor (Bipolar Stepper, DC, BLDC)
- Compatible with Windows XP/Vista/7/8/10, Linux, Mac OS
- Max. speed – 35000 steps/s (stepper); 800000 encoder counts per second (DC)
- Code Examples for Visual Basic, C, C#, C++, Matlab, Labview, Python
Positioning in vacuum or cryogenic environment
- Vacuum 10-6 mbar, bake out at 80°C
- High Vacuum 10-7 mbar, bake out at 100°C
- Ultra High Vacuum 10-9 mbar, bake out at 110°C
- Ultra High Vacuum Special 10-10 mbar, bake out at 200°C
- Standard 77°K
- Vacuum compatible
- R & D 4°K
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