Our sensors and systems allow contactless positon measurements with sub-nm resolution. 

The product range includes complete Michelson-Interferometers (1, 2 or 3 beams) to measure distances and angles and vibrations (Vibrometers that are based on the same principle).

These instruments include miniaturized Laser-Interferometers using a fiber-coupled HeNe Laser as light source. Sophisticated stabilization technique of the laser frequency and correction of the wavelength by measuring the environmental parameters (air temperature, pressure and rel. humidity) lead to very precise length measurements. Please be aware that the lab requirements are very high if you want  measure in the nm range.
 

For OEM customers we offer capacitive sensors to be integrated into position control loops. They can measure up to several 100µm and are also used in our nanopositioning systems from PI.